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Metal oxide-based thin film structures : formation, characterization, and application of interface-based phenomena /
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Atomic layer deposition for semiconductors /
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Subject (ZB): “...thin film technology...”
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Atomic layer deposition of nanostructured materials /
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Subject (ZB): “...film deposition...”
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Oxide ultrathin films : science and technology /
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Subject (ZB): “...thin film...”
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