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1
Book
The Physics of micro/nano-fabrication /
Brodie
,
Ivor
.
1992
Other Personal Name(s):
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...
Brodie
,
Ivor
....
”
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Brodie, Ivor.
1
Muray, Julius J.
1
Subject
ion beam processing
1
lithography
1
microelectronics
microfabrication (for microelectronics only)
1
microtechnology
1
pattern formation
1
Classification
FGM - Microelectronic technology
1
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