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Select result number 1
1
Book
ULSI technology /
Chang
,
C
. Y.
1996
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Chang
,
C
. Y....
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IBN-1-2
IFF
1
Name
Chang, C. Y.
1
Subject
ULSI (ultra large scale integration)
1
chemical vapor deposition
1
epitaxy
1
etching
1
fabrication
1
lithography
1
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metallization
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reliability
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FGK - Thin film technology, epitaxy
1
FGM - Microelectronic technology
1
TBL - VLSI
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