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Ahmed, Haroon
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1
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Microcircuit engineering. 1989 : Microcircuit engineering: international conference. 15 : International conference on microlithography : ME. 1989 : Cambridge, 26.09.89-28.09.89 /
Ahmed, Haroon
1990
Other Personal Name(s):
“
...
Jones
, Geraint A.
C
....
”
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2
Book
Microcircuit engineering. 1983 : Microcircuit engineering conference. 1983: proceedings : ME. 1983: proceedings : Cambridge, 25.09.1983-29.09.1983 /
Ahmed, Haroon
1983
Other Personal Name(s):
“
...
Jones
, Geraint A.
C
....
”
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Book
2
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Conference Publication
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ZB
2
Name
Ahmed, Haroon
Cleaver, John R. A.
2
Jones, Geraint A. C.
2
Broers, Alec Nigel
1
McMahon, Richard A.
1
Subject
microfabrication (for microelectronics only)
1
microlithography
1
optical microlithography
1
photoresist
1
Classification
FGME - Microlithography
2
Language
English
2
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