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Broers, Alec Nigel
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Broers, Alec Nigel
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Microcircuit engineering. 1989 : Microcircuit engineering: international conference. 15 : International conference on microlithography : ME. 1989 : Cambridge, 26.09.89-28.09.89 /
Ahmed, Haroon
1990
Other Personal Name(s):
“
...
Jones
, Geraint A.
C
....
”
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Ahmed, Haroon
1
Broers, Alec Nigel
Cleaver, John R. A.
1
Jones, Geraint A. C.
1
McMahon, Richard A.
1
Subject
microlithography
1
optical microlithography
1
photoresist
1
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FGME - Microlithography
1
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English
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