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1
Book
Manufacturing techniques for microfabrication and nanotechnology /
Madou
,
Marc
J
.
2012
Other Personal Name(s):
“
...
Madou
,
Marc
J
....
”
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ZB
1
Name
Madou, Marc J.
1
Subject
chemical vapor deposition
1
etching
1
lithography
microfabrication (for microelectronics only)
1
nanotechnology
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FGN - Nanotechnology
1
FGT - Microtechnology
1
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English
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