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Ion implantation : Equipment and techniques : Ion implantation : international conference 0004 : Berchtesgaden, 13.09.1982-17.09.1982.
Ryssel
,
H
.
1983
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...
Ryssel
,
H
....
”
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Ryssel, H.
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ion implantation
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FGGB - Ion implantation, ion beam synthesis
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