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IBN-1-2
FGM - Microelectronic technology
epitaxy
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IBN-1-2
FGM - Microelectronic technology
epitaxy
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1
Book
Handbook of thin film devices. 1. Hetero-structures for high performance devices /
Wood, Colin E. C.
2000
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2
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ULSI technology /
Chang, C. Y.
1996
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Handbook, Textbook
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IBN-1-2
IFF
1
Name
Chang, C. Y.
1
Wood, Colin E. C.
1
Subject
epitaxy
ULSI (ultra large scale integration)
1
chemical vapor deposition
1
etching
1
fabrication
1
field effect transistor
1
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heterojunction
1
heterostructure
1
lithography
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metallization
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reliability
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solid state device
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thin film technology
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Classification
FGK - Thin film technology, epitaxy
2
FGM - Microelectronic technology
FJLB - Physics of semiconductor devices
1
TBL - VLSI
1
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