Skip to content
Toggle navigation
VuFind
0
Items in e-Shelf
(Full)
History
User Account
Logout
User Account
Help
English
Deutsch
Books & more
Articles & more
JuSER
All Fields
Title
Journal Title
Name
Institution
Subject
Classification
Shelf Classification
Table of Contents
DOI
ISBN/ISSN
Call number
Report Number
Barcode
Full Texts (available in selection)
Find
Advanced
Reset Filters
IBN-1-2
TBL - VLSI
AND
FGK - Thin film technology, epitaxy
Reset Filters
Show filters (3)
IBN-1-2
TBL - VLSI
AND
FGK - Thin film technology, epitaxy
Ask a Librarian
Books & more
: Hits
1 - 3
of
3
sort by
Relevance
Year (descending)
Year (ascending)
Call Number
Author
Title
Select all titles on this page
Email
Export
Print
Save
Add to e-Shelf
Select result number 1
1
Book
Interconnects in VLSI design /
Grabinski, Hartmut
2000
Call number:
Loading...
Located:
Loading...
Loading...
Literature Request
Loan/Reservation
Favorites
Saved in:
QR Code
Select result number 2
2
Book
Silicon VLSI technology : fundamentals, practice and modeling /
Plummer, James D.
2000
Call number:
Loading...
Located:
Loading...
Loading...
Literature Request
Loan/Reservation
Favorites
Saved in:
QR Code
Select result number 3
3
Book
ULSI technology /
Chang, C. Y.
1996
Call number:
Loading...
Located:
Loading...
Loading...
Literature Request
Loan/Reservation
Favorites
Saved in:
QR Code
Select all titles on this page
Email
Export
Print
Save
Add to e-Shelf
Back
Narrow Search Results
Available as
Print Edition
3
Material Type
Book
3
Type of Literature
Handbook, Textbook
1
Year of Publication
From:
To:
Location
IBN-1-2
IFF
1
Name
Chang, C. Y.
1
Deal, Michael D.
1
Grabinski, Hartmut
1
Griffin, Peter B.
1
Plummer, James D.
1
Subject
VLSI technology
2
ULSI (ultra large scale integration)
1
chemical vapor deposition
1
connector
1
epitaxy
1
etching
1
more ...
fabrication
1
lithography
1
metallization
1
reliability
1
see all ...
less ...
Classification
FGK - Thin film technology, epitaxy
FGM - Microelectronic technology
3
TBL - VLSI
×
Loading...
