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IBN-1-2
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TBL - VLSI
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1
Book
Fundamentals of modern VLSI devices /
Taur, Yuan
1998
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2
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ULSI technology /
Chang, C. Y.
1996
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Material Type
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2
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1
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IBN-1-2
IFF
IBN-3-4
1
ZB
1
Name
Chang, C. Y.
1
Ning, Tak H.
1
Taur, Yuan
1
Subject
ULSI (ultra large scale integration)
1
VLSI (very large scale integration)
1
chemical vapor deposition
1
epitaxy
1
etching
1
fabrication
1
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integrated circuit
1
lithography
1
metallization
1
reliability
1
semiconductor device
1
solid state device
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Classification
TBL - VLSI
FGK - Thin film technology, epitaxy
1
FGM - Microelectronic technology
1
FJLB - Physics of semiconductor devices
1
Language
English
1
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