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IBN-1-2
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1
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Electrochemistry of silicon : instrumentation, science, materials and applications /
Lehmann, Volker.
2002
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2
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Handbook on physical properties of Ge, Si, GaAs and InP.
Dargys, A.
1994
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Materials issues in novel Si-based technology : symposium held Nevember 26-28, 2001 Boston, Massachusetts, US /
En, William G.
2002
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Si front-end processing : physics and technology of dopant-defect interactions : symposium held April 6 - 9, 1999, San Francisco, California, USA [as part of the 1999 MRS spring me...
Gossmann, Hans-Joachim L.
1999
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5
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Silicon processing for the VLSI era. 1. Process technology /
Wolf, Stanley.
2000
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Available as
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5
Material Type
Book
5
Type of Literature
Conference Publication
2
Handbook, Textbook
1
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IBN-1-2
ZB
2
IFF
1
Name
Dargys, A.
1
En, William G.
1
Gossmann, Hans-Joachim L.
1
Kundrotas, J.
1
Lehmann, Volker.
1
Tauber, Richard N.
1
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Wolf, Stanley.
1
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Subject
silicon
VLSI technology
1
electrochemistry
1
gallium arsenide
1
germanium
1
indium phosphide
1
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integrated circuit
1
materials
1
porous silicon
1
research
1
semiconductor processing
1
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Classification
CNE - Electrochemistry
1
FAA - Materials research - reference books
1
FAF - Materials research - comprehensive works
1
FGM - Microelectronic technology
1
FJHE - Defects and radiation effects in semiconductors
1
FJK - Specific semiconductor materials
1
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FJLB - Physics of semiconductor devices
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