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FGK - Thin film technology, epitaxy
epitaxy
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design
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FGK - Thin film technology, epitaxy
epitaxy
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design
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Aufbau einer Molekularstrahlepitaxie-Anlage zur Herstellung von CoSi2/Si-Heterostrukturen und in Silizium vergrabener SiOx-Schichten sowie Charakterisierung dieser Schichtsysteme [...
Hacke, Marcus
1996
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Hacke, Marcus
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epitaxy
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molecular beam
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silicon
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Classification
FGK - Thin film technology, epitaxy
Language
German
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