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Theses
thin film
Burges, Ulrich
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Theses
thin film
Burges, Ulrich
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Relaxation mechanischer Spannungen in dünnen Metallisierungsschichten [E-Book] /
Burges, Ulrich
1995
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ZB
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Name
Burges, Ulrich
Subject
metallization
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relaxation
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strain
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thin film
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FFP - Physics of thin films
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German
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