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1

Journal Article

Characterization of lanthanum lutetium oxide thin films grown by atomic layer deposition as an alternative gate dielectric

Roeckerath, M.
2008

Thin solid films, 517 (2008) S. 201 - 203

“...Halbleiter-Nanoelektronik; IBN-1 Halbleiter-Nanoelektronik...”

2

Contribution to a book

Amorphous Lanthanum Lutetium Oxide Thin Films as an Alternative High-k Material : Physics and technology of high-k gate dielectrics 5

Lopes, J. M. J.
2007

“...Halbleiter-Nanoelektronik; IBN-1 Halbleiter-Nanoelektronik...”

3

Conference Presentation

Amorphous lanthanum lutetium oxide thin films as an alternative high-k material

Lopes, J. M. J.
2007

“...Halbleiter-Nanoelektronik; IBN-1 Halbleiter-Nanoelektronik...”

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