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Ding, Y.
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Fitsilis, F.
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Jia, C. L.
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Schumacher, M.
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Ding, Y.
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Nucleation and growth of thin (Ba,Sr)TiO3 films in a MOCVD reactor
Regnery, S.
2003
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(Ba,Sr)TiO3 thin film growth in a batch processing MOCVD reactor
Regnery, S.
2003
Journal of the European Ceramic Society, 24 (2003) S. 271-276
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Ehrhart, P.
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Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik
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Mikrostrukturforschung; IFF-IMF
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Center of Nanoelectronic Systems for Information Technology; CNI
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Elektrokeramische Materialien; IFF-EKM
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