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Dittberner, C.
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Moers, J.
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Trellenkamp, Stefan
Grundlagen für zukünftige Informationstechnologien
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Dittberner, C.
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Moers, J.
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Trellenkamp, Stefan
Grundlagen für zukünftige Informationstechnologien
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Journal Article
Broadband transmission masks, gratings and filters for extreme ultraviolet and soft X-ray lithography
Brose, S.
2012
Thin solid films, 520 (2012) S. 5080 - 5085
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Bergmann, K.
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Brose, S.
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Dittberner, C.
Grützmacher, Detlev
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Grundlagen für zukünftige Informationstechnologien
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Bioelektronik; PGI-8
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Halbleiter-Nanoelektronik; PGI-9
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