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1

Journal Article

Deposition of intrinsic hydrogenated amorphous silicon for thin-film solar cells - a comparative study for layers grown statically by RF-PECVD and dynamically by VHF-PECVD

Zimmermann, T.
2014

Progress in photovoltaics, 22 (2014) 2, S. 198 - 207

2

Journal Article

Dynamic deposition of microcrystalline silicon

Zimmermann, Thomas
2013

SPIE newsroom S. 1-3

3

Journal Article

a-Si:H/μc-Si:H solar cells prepared by the single-chamber processes—minimization of phosphorus and boron cross contamination

Merdzhanova, Tsvetelina
2013

Thin solid films, 540 (2013) S. 251 - 255

4

Journal Article

Cross-contamination in single-chamber processes for thin-film silicon solar cells

Woerdenweber, J.
2012

Journal of non-crystalline solids, 358 (2012) 17, S. 2183 - 2186

5

Journal Article

Single-chamber processes for a-Si:H solar cell deposition

Merdzhanova, T.
2012

Solar energy materials & solar cells, 98 (2012) S. 146 - 153

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