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Hardtdegen, Hilde
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Makarov, Yu. N.
Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik
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Hardtdegen, Hilde
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Makarov, Yu. N.
Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik
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Journal Article
MOVPE process for horizontal reactors with reduced parasitic deposition
Hardtdegen, H.
2004
Journal of crystal growth, 272 (2004) S. 407 - 414
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Journal Article
MOVPE growth and in situ characterization of GaN layers on sapphire substrates
Hardtdegen, H.
2004
Physica status solidi / A, 201 (2004) S. 312 - 319
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Conference Presentation
MOVPE process for horizontal reactors with reduced parasitic deposition
Hardtdegen, H.
2004
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Hardtdegen, Hilde
Kaluza, N.
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Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik
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Institut für Halbleiterschichten und Bauelemente; ISG-1
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