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Internal Report
MoBeE Molecular Beam Epitaxie - Prozesssteuerung an der Molekularstrahl-Epitaxie-Anlage
Heer, H.
2004
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Winnerl
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Heer, H.
Wagner, M.
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Winnerl, S.
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Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik
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Zentralinstitut für Elektronik; ZEL
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2004
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