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Hoffmann, M.
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Küppers, H.
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Mokwa, W.
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Waser, R.
Institut für Festkörperforschung; IFF
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Hoffmann, M.
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Küppers, H.
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Mokwa, W.
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Waser, R.
Institut für Festkörperforschung; IFF
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Poster
A new concept and first development results of a PZT thin film actuator
Hoffmann, M.
2000
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2
Poster
Piezoelectric bending actuator for microelectro-mechanical applications
Küppers, H.
2000
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Böttger, U.
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Research Program
Festkörperforschung für die Informationstechnik
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Institut für Festkörperforschung; IFF
Scientific Report
2000
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