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Hoffmann, M.
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Hoffmann, M.
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1
Journal Article
Basic investigations on a piezoelectric bending actuator for micro-electro-mechanical applications
Küppers
,
H
.
2001
Ferroelectrics, 35 (2001) S. 269 - 281
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H
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Poster
A new concept and first development results of a PZT thin film actuator
Hoffmann, M.
2000
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Piezoelectric bending actuator for microelectro-mechanical applications
Küppers
,
H
.
2000
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3
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Poster
2
Journal Article
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Name
Böttger, U.
3
Hoffmann, M.
Küppers, H.
3
Mokwa, W.
3
Schneller, T.
3
Waser, R.
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Leuerer, T.
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Schnakenberg, U.
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Schankenberg, U.
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Research Program
Festkörperforschung für die Informationstechnik
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Contributing Institute
Institut für Festkörperforschung; IFF
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Elektrokeramische Materialien; IFF-EKM
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Scientific Report
2000
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