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Hueging, N.
Mikrostrukturforschung; IFF-IMF
Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik
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Hueging, N.
Mikrostrukturforschung; IFF-IMF
Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik
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Conference Presentation
Strained silicon on relaxed SiGe made by ion implantation and strain transfer
Mantl, S.
2004
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He implantation induced relaxation of SiGe/Si: Nucleation of dislocations and coarsing of He bubbles
Luysberg, M.
2004
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