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Kishimoto, N.
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Plaksin, O. A.
2006
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Kishimoto, N.
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2006
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Journal Article
Atomic force microscopy and x-ray
photoelectron
spectroscopy
studies of ZnO nanoparticles on Si2O fabricated by ion implantation and thermal oxidation
Amekura, H.
2006
Applied physics letters, 89 (2006) S. 023115
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Journal Article
Concentration profiles of Zn ions implanted with 60 keV for nanoparticle formation in silica glass
Amekura, H.
2006
Vacuum, 80 (2006) S. 802 - 805
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Kishimoto, N.
Plaksin, O. A.
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Grundlagen für zukünftige Informationstechnologien
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Institut für Halbleiterschichten und Bauelemente; ISG-1
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