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Kluth, P.
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Mantl, S.
Contribution to a book
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Kluth, P.
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Mantl, S.
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Double gate MOSFET with vertical channel
Moers, J.
2003
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Self-assembly CoSi2-nanostructures for fabrication of Schottky barrier MOSFETs on SOI
Kluth, P.
2002
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Self-assembled epitaxial CoSi2/Si(100) nanostructures
Kluth, P.
2001
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Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik
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Institut für Halbleiterschichten und Bauelemente; ISG-1
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