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Lupták, R.
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Mantl, S.
JARA-FIT; JARA-FIT
Journal Article
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Lupták, R.
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Mantl, S.
JARA-FIT; JARA-FIT
Journal Article
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1
Journal Article
High mobility compressive strained Si0.5Ge0.5 quantum well p-MOSFETs with higher-k/metal-gate
Yu, W.
2011
Solid state electronics, 62 (2011) 1, S. 185 - 188
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2011
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2
Journal Article
Rare-Earth Scandate/TiN Gate Stacks in SOI MOSFETs Fabricated with a Full Replacement Gate Process
Durgun Özben, E.
2011
IEEE Transactions on Electron Devices, 58 (2011) S. 617 - 622
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2011
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3
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Rare-earth oxide/TiN gate stacks on high mobility strained silicon on insulator for fully depleted metal-oxide-semiconductor field-effect transistors
Durgun Özben, E.
2011
Journal of vacuum science & technology / B, 29 (2011) S. 01A903
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4
Journal Article
Atomic layer deposition of HfO2 and Al2O3 layers on 300 mm Si wafers for gate stack technology
Lupták, R.
2011
Journal of vacuum science & technology / B, 29 (2011) S. 01A301
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4
Document Type
Journal Article
Name
Lenk, Steffi
4
Lupták, R.
Mantl, S.
Besmehn, A.
3
Bourdelle, K.K.
3
Dürgün-Özben, Eylem
3
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Lopes, J.M.J.
3
Nichau, A.
3
Schubert, Jürgen
3
Zhao, Q.T.
3
Baumann, P.K.
1
Breuer, U.
1
Buca, Dan Mihai
1
Feste, S.
1
Habicht, S.
1
Hartmann, J.M.
1
Heuken, M.
1
Holländer, Bernhard
1
Lopes, J.M.
1
Luysberg, M.
1
Schnee, M.
1
Tiedemann, Andreas
1
Wang, X.
1
Yu, W.
1
Zhang, B.
1
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Research Program
Grundlagen für zukünftige Informationstechnologien
4
Silicon-based nanostructures and nanodevices for long term nanoelectronics applications
2
Contributing Institute
Halbleiter-Nanoelektronik; PGI-9
4
JARA-FIT; JARA-FIT
Zentralabteilung für Chemische Analysen; ZCH
2
Halbleiter-Nanoelektronik; IBN-1
1
Mikrostrukturforschung; PGI-5
1
Scientific Report
2011
4
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