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Luysberg, Martina
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Luysberg, Martina
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Journal Article
LaLuO3 higher-k dielectric integration in SOI MOSFETs with a gate-first process
Nichau, A.
2012
Solid state electronics, 71 (2012) S. 19 - 24
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Lanthanum Lutetium oxide integration in a gate-first process on SOI MOSFETs
Nichau, A.
2011
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Lenk, Steffi
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Lopes, J.M.J.
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Grundlagen für zukünftige Informationstechnologien
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Halbleiter-Nanoelektronik; PGI-9
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JARA-FIT; JARA-FIT
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Mikrostrukturforschung; PGI-5
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Zentralabteilung für Chemische Analysen; ZCH
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