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Regnery, S.
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Schienle, F.
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Schumacher, M.
Elektrokeramische Materialien; IFF-EKM
Poster
2002
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Regnery, S.
AND
Schienle, F.
AND
Schumacher, M.
Elektrokeramische Materialien; IFF-EKM
Poster
2002
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Poster
(Ba,Sr)TiO3 thin films growth in a batch processing MOCVD reactor
Regnery, S.
2002
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Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik
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