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Elektrokeramische Materialien; IFF-EKM
Schumacher, M.
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Schienle, F.
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Elektrokeramische Materialien; IFF-EKM
Schumacher, M.
AND
Schienle, F.
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1
Poster
Growth of (Ba,Sr)TiO3 thin films by MOCVD: stoichiometry effects
Ehrhart, P.
2003
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Nucleation and growth of thin (Ba,Sr)TiO3 films in a MOCVD reactor
Regnery, S.
2003
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(Ba,Sr)TiO3 thin films growth in a batch processing MOCVD reactor
Regnery, S.
2002
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Conference Presentation
Nucleation and growth of thin (Ba,Sr)TiO3 films in a MOCVD reactor
Regnery, S.
2002
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5
Journal Article
Growth of (Ba,Sr)TiO3 thin films by MOCVD : stoichiometry effects
Ehrhart, P.
2002
Integrated ferroelectrics, 45 (2002) S. 59 - 68
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6
Journal Article
BST thin films grown in a multi-wafer MOCVD reactor
Fitsilis, F.
2001
Journal of the European Ceramic Society, 21 (2001) S. 1547 - 1551
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Growth of (Ba,Sr)TiO3 thin films in a multi-wafer MOCVD reactor
Ehrhart, P.
2001
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7
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Contribution to a book
2
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Regnery, S.
7
Schienle, F.
Schumacher, M.
Waser, R.
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Ehrhart, P.
6
Fitsilis, F.
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Juergensen, H.
5
Dauelsberg, M.
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Ding, Y.
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Jia, C. L.
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Krumpen, W.
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Strzyzewski, P.
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Ehrhart, F.
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Jia, C.
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Jürgensen, H.
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McEntee, T.
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Szot, K.
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Research Program
Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik
5
Festkörperforschung für die Informationstechnik
2
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Elektrokeramische Materialien; IFF-EKM
Mikrostrukturforschung; IFF-IMF
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Zentralabteilung für Chemische Analysen; ZCH
1
Scientific Report
2002
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2001
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2003
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