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Journal Article
Applied physics letters, 96 (2010) S. 122902
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Journal Article
Microelectronic engineering, 86 (2009) S. 2275 - 2278
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Contribution to a book
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Poster
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Poster
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Poster
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Journal Article
Meier, M.
2008
Microelectronic engineering, 85 (2008) S. 870 - 872
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Poster
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Journal Article
Thin solid films, 516 (2008) S. 4713 - 4719
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Conference Presentation
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Contribution to a book
Contribution to a conference proceedings
Flocke, A.
2008
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Poster
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Poster
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Poster
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16
Journal Article
Yang, Z.
2007
Journal of micromechanics and microengineering, 17 (2007) S. 1788
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