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Elektronische Materialien; IFF-6
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Kondensierte Materie
Bhakta, R.
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Elektronische Materialien; IFF-6
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Kondensierte Materie
Bhakta, R.
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Journal Article
Synthesis and characterisation of zirconium–amido guanidinato complex: a potential precursor for ZrO2 thin films
Devi, A.
2007
Dalton transactions (2007) S. 1671 - 1676
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Journal Article
Thin Films of ZrO2 for High-k Applications Employing Engineered Alkoxide- and Amide-Based MOCVD Precursors
Thomas, R.
2007
Chemical vapor deposition, 13 (2007)
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