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Elektronische Materialien; IFF-IEM
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Mikrostrukturforschung; IFF-IMF
Ding, Y.
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Fitsilis, F.
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Elektronische Materialien; IFF-IEM
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Mikrostrukturforschung; IFF-IMF
Ding, Y.
AND
Fitsilis, F.
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Journal Article
(Ba,Sr)TiO3 thin film growth in a batch processing MOCVD reactor
Regnery, S.
2003
Journal of the European Ceramic Society, 24 (2003) S. 271-276
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Journal Article
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Ding, Y.
Ehrhart, P.
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Fitsilis, F.
Jia, C. L.
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Regnery, S.
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Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik
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Center of Nanoelectronic Systems for Information Technology; CNI
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Elektronische Materialien; IFF-IEM
Mikrostrukturforschung; IFF-IMF
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2004
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