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Elektronische Materialien; PGI-7
Aslam, Nabeel
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Banerjee, Manish
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Elektronische Materialien; PGI-7
Aslam, Nabeel
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Banerjee, Manish
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Journal Article
[Zr(NEtMe) 2 (guan-NEtMe) 2 ] as a Novel Atomic Layer Deposition Precursor: ZrO 2 Film Growth and Mechanistic Studies
Blanquart, Timothee
2013
Chemistry of materials, 25 (2013) 15, S. 3088 - 3095
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