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Institut für Halbleiterschichten und Bauelemente; ISG-1
2003
Kluth, P.
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Institut für Halbleiterschichten und Bauelemente; ISG-1
2003
Kluth, P.
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Double gate MOSFET with vertical channel
Moers, J.
2003
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2
Talk (non-conference)
Double gate MOSFET with vertical channel
Moers, J.
2003
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3
Journal Article
Fabrication of Schottky barrier MOSFETs using self-assembly CoSi2 nanopatterning and spacer gate technologies
Zhao, Q. T.
2003
Microelectronic engineering, 70 (2003) S. 186 - 190
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Journal Article
Fabrication of Schottky Barrier MOSFETs on SOI by a Self-Assembly CoSi2-Patterning Method
Zhao, Q.-T.
2003
Solid state electronics, 47 (2003) S. 1183 - 1186
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Conference Presentation
Fabrication of 50nm MOSFETs Using A Self-Assembly CoSi2 Nanopatterning Method and A Spacer-Gate
Zhao, Q. T.
2003
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6
Talk (non-conference)
Vertical Double-Gate MOSFETs
Moers, J.
2003
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Name
Kluth, P.
Mantl, S.
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Goryll, M.
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Moers, J.
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Trellenkamp, Stefan
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Hogg, S.
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Marso, M.
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von der Hart, A.
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Research Program
Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik
6
Contributing Institute
Institut für Halbleiterschichten und Bauelemente; ISG-1
Scientific Report
2003
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