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JARA-FIT; JARA-FIT
Grundlagen für zukünftige Informationstechnologien
2007
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JARA-FIT; JARA-FIT
Grundlagen für zukünftige Informationstechnologien
2007
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Journal Article
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Journal Article
Roughness improvement of the CoSi2/Si interface for an application as buried silicide
Zimmermann
, S.
2007
Microelectronic engineering, 84 (2007) S. 2537
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, S....
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Grundlagen für zukünftige Informationstechnologien
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Center of Nanoelectronic Systems for Information Technology; CNI
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Halbleiter-Nanoelektronik; IBN-1
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JARA-FIT; JARA-FIT
Scientific Report
2007
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