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Deposition and qualification of tungsten coatings produced by plasma deposition in WF6 precursor gas
Philipps, V.
2011
2011
Physica scripta, T145 (2011) S. 014030
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Listopad, A.A.
2010
2010
Review of scientific instruments, 81 (2010) S. 02B104
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OpenAccess
OpenAccess
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