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Werkstoffsynthese und Herstellungsverfahren; IEK-1
2015
Buchkremer, Hans Peter
AND
Keuter, Thomas
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Werkstoffsynthese und Herstellungsverfahren; IEK-1
2015
Buchkremer, Hans Peter
AND
Keuter, Thomas
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Journal Article
Modeling precursor diffusion and reaction of atomic layer deposition in porous structures
Keuter, Thomas
2015
Journal of vacuum science & technology / A, 33 (2015) 1, S. 01A104
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Buchkremer, Hans Peter
Keuter, Thomas
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