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Talk (non-conference)
2002
Mantl, S.
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Talk (non-conference)
2002
Mantl, S.
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Talk (non-conference)
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1
Talk (non-conference)
Mit Helium Implantation zu schnelleren Si basierenden Bauelementen
Mantl, S.
2002
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2
Talk (non-conference)
Helium Implantation, ein neuer Weg zu ultradünnen, spannungsrelaxierten Si-Ge Schichten
Mantl, S.
2002
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3
Talk (non-conference)
Double-gate MOSFET with vertical layout
Moers, J.
2002
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4
Talk (non-conference)
Vertical double-gate MOSFET
Moers, J.
2002
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5
Talk (non-conference)
Vertical double-gate MOSFET
Moers, J.
2002
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6
Talk (non-conference)
Siliziumbasierende Nanostrukturen für die zukünftige Nanoelektronik
Mantl, S.
2002
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7
Talk (non-conference)
Nanostructures and SiGe for future MOSFETs
Mantl, S.
2002
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8
Talk (non-conference)
He implantation into Si-Ge/Si heterostructures
Mantl, S.
2002
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9
Talk (non-conference)
He-Implantation für neue Si-Ge Bauelemente
Mantl, S.
2002
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10
Talk (non-conference)
Towards strained silicon : strain relaxed ultrathin SiGe buffer layers on Si and SOI produced by He+ ion implantation and annealing
Mantl, S.
2002
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11
Talk (non-conference)
Neue Materialien : vom physikalischen Konzept zur Anwendung
Ebert, P.
2002
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11
Document Type
Talk (non-conference)
Name
Mantl, S.
Goryll, M.
3
Hogg, S.
3
Kordos, P.
3
Lüth, H.
3
Moers, J.
3
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Trellenkamp, Stefan
3
Kluth, P.
2
Marso, M.
2
Zhao, Q.-T.
2
Ebert, P.
1
Kreibig, U.
1
Michely, Th.
1
Urban, K.
1
Vescan, L.
1
Wuttig, M.
1
von Plessen, G.
1
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Research Program
Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik
10
Kondensierte Materie
1
Contributing Institute
Institut für Halbleiterschichten und Bauelemente; ISG-1
10
Mikrostrukturforschung; IFF-IMF
1
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2002
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