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2001
Contribution to a conference proceedings
Luysberg, Martina
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Holländer, Bernhard
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2001
Contribution to a conference proceedings
Luysberg, Martina
AND
Holländer, Bernhard
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Substrate engineering by hydrogen or helium implantation for epitaxial growth of lattice mismatched Si(1-x)Gex films on silicon
Holländer, B.
2001
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Relaxation of Si(1-x)Gex buffer layers on Si(100) through helium ion implantation
Luysberg, M.
2001
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2
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Contribution to a book
2
Contribution to a conference proceedings
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Fichtner, P. F. P.
2
Hackbarth, T.
2
Herzog, H.-J.
2
Holländer, Bernhard
Kirch, D.
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Lenk, Steffi
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Luysberg, Martina
Mantl, S.
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Trinkaus, H.
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Research Program
Festkörperforschung für die Informationstechnik
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Ionentechnik
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Institut für Halbleiterschichten und Bauelemente; ISG-1
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Mikrostrukturforschung; IFF-IMF
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Institut für Medizin; IME
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Theorie III; IFF-TH-III
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