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MEMS tuneable dielectric resonator
Panaitov
,
G
.
2006
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Aluminium nitride niobium multilayers and free- standing structures for MEMS
Danylyuk, S. V.
2006
Thin solid films, 515 (2006) S. 489 - 492
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Contribution to a book
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Klein, N.
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Ott, R.
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Panaitov, Gregory
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Belyaev, A. E.
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Danylyuk, S. V.
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Research Program
Grundlagen für zukünftige Informationstechnologien
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Institut für Bio- und Chemosensoren; ISG-2
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Center of Nanoelectronic Systems for Information Technology; CNI
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