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Journal Article
Monitoring of powder formation via optical emission spectroscopy and self-bias-voltage measurements for high depletion µc-Si:H deposition regimes
Grootoonk, B.
2014
Canadian journal of physics, 92 (2014) 7/8, S. 736 - 739
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Enhancement of a-Si/µc-Si solar cell performance made in an industrial PECVD reactor: The role of chamber history and in situ diagnostics
Gabriel
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O
.
2011
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Gabriel, O.
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