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Hennings, A.
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Conference Presentation
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Journal Article
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1
Journal Article
An Integrated Microelectromechanical Microwave Switch Based on Piezoelectric Actuation
Kügeler
,
C
.
2009
Journal of electroceramics, 22 (2009)
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,
C
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2
Conference Presentation
Design and realization of an integrated microwave switch based on piezoelectric PZT and PLHT thin films
Kügeler
,
C
.
2008
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,
C
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3
Conference Presentation
An integrated microelectromechanical microwave switch based on piezoelectric actuation
Kügeler
,
C
.
2007
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Kügeler
,
C
....
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3
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Conference Presentation
2
Journal Article
1
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Böttger, U.
3
Hennings, A.
Kügeler, C.
3
Waser, R.
3
Research Program
Grundlagen für zukünftige Informationstechnologien
3
Contributing Institute
Elektronische Materialien; IFF-6
3
JARA-FIT; JARA-FIT
2
Center of Nanoelectronic Systems for Information Technology; CNI
1
Scientific Report
2007
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2008
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2009
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