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High-Rate Deposited Amorphous and Microcrystalline Silicon Based Tandem Cells and Modules

Kilper, T.
2009

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2

Journal Article

Oxygen and nitrogen impurities in microcrystalline silicon deposited under optimized conditions: Influence on material properties and solar cell performance

Kilper, T.
2009

Journal of applied physics, 105 (2009) S. 074509

“...Kilper, T....”
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3

Conference Presentation

High-rate deposited amorphous and microcrystalline silicon based tandem cells and modules

Kilper, T.
2009

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4

Journal Article

Control of plasma process instabilities during thin silicon film deposition

Hrunski, D.
2009

Thin solid films, 517 (2009) S. 4188 - 4191

“...Kilper, T....”

5

Conference Presentation

The influence of oxygen incorporation on the properties µc-Si and the performance of µc-Si based solar cells

Kilper, T.
2008

“...Kilper, T....”

6

Journal Article

Microcrystalline silicon deposition process stability and process control

Van den Donker, M. N.
2007

Thin solid films, 515 (2007) S. 7455 - 7459

“...Kilper, T....”

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