1
2
3
Microelectronic engineering, 86 (2009) S. 2275 - 2278
...Nauenheim, C....
4
5
Meier, M.
2008
Microelectronic engineering, 85 (2008) S. 870 - 872
...Nauenheim, C....
6
7
8
9
10
11
12
13
14
15
16
17
Yang, Z.
2007
Journal of micromechanics and microengineering, 17 (2007) S. 1788
...Nauenheim, C....
18
19
20