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Deposition and qualification of tungsten coatings produced by plasma deposition in WF6 precursor gas
Philipps, V.
2011
2011
Physica scripta, T145 (2011) S. 014030
“...Philipps, V....”
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Matveeva, M.
2011
2011
Verhandlungen der Deutschen Physikalischen Gesellschaft, 46/4 (2011)
“...Philipps, V....”
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Coenen, J.W.
2011
2011
Verhandlungen der Deutschen Physikalischen Gesellschaft, 46 (2011) S. P21.1
“...Philipps, V....”
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