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Materials science in semiconductor processing

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ISSN: 13698001
Imprint: Oxford : Pergamon.
Classification:
P - Physics ( journals )
Collection: ZB; Vol. 1. 1998 - Vol. 6. 2003
Location: Magazin, 1. Etage links
Available as an e-journal?

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LEADER 00567cas a2200205 n 4500
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022 |a 13698001 
035 |a (Sirsi) a10137 
037 |a Erwerb eingestellt 
084 0 |a P - Physics ( journals ) 
222 |a Materials science in semiconductor processing   |b [Zeitschrift] 
245 0 0 |a Materials science in semiconductor processing 
260 |a Oxford :   |b Pergamon. 
596 |a 1 
900 |a Z 004933 / / 01 
902 |a ZB16 
920 |a ZDB 1433435-5 
921 |a Magazin 1. Etage 
866 3 1 |z ZB;   |a Vol. 1. 1998 - Vol. 6. 2003 

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