Materials science in semiconductor processing
Saved in:
| ISSN: | 13698001 |
|---|---|
| Imprint: |
Oxford :
Pergamon.
|
| Classification: | |
| Collection: |
ZB; Vol. 1. 1998 - Vol. 6. 2003 |
| Location: | Magazin, 1. Etage links |
Available as an e-journal?
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| 084 | 0 | |a P - Physics ( journals ) | |
| 222 | |a Materials science in semiconductor processing |b [Zeitschrift] | ||
| 245 | 0 | 0 | |a Materials science in semiconductor processing |
| 260 | |a Oxford : |b Pergamon. | ||
| 596 | |a 1 | ||
| 900 | |a Z 004933 / / 01 | ||
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| 920 | |a ZDB 1433435-5 | ||
| 921 | |a Magazin 1. Etage | ||
| 866 | 3 | 1 | |z ZB; |a Vol. 1. 1998 - Vol. 6. 2003 |