An introduction to semiconductor microtechnology.
Saved in:
Personal Name(s): | Morgan, D. V. |
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Board, K. | |
Edition: |
Repr. with corr. |
Imprint: |
Chichester :
Wiley,
1985.
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Physical Description: |
XII, 167 S. |
Note: |
englisch |
ISBN: |
9780471901488 0471901482 |
Series Title: |
Open University set book.
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Subject (ZB): | |
Classification: |
ZB | |
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