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Silicon materials.

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Personal Name(s): Einspruch, N. G., editor
Imprint: Orlando, FL : Academic Pr., 1985.
Physical Description: XII, 463 S.
Note: englisch
ISBN: 9780122341120
0122341120
Series Title: VLSI electronics microstructure science ; 12.
Subject (ZB):
VLSI technology
Classification:
FGM - Microelectronic technology
FJKB - Elemental semiconductors
Shelf Classification:
FGM - Mikroelektronik - Technologie
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Reading Room Call Number: FGM 019-12 Barcode: 1087000648 Available   

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