Silicon processing for the VLSI era. 1. Process technology / Stanley Wolf ; Richard N. Tauber.
Saved in:
Personal Name(s): | Wolf, Stanley. |
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Tauber, Richard N. | |
Imprint: |
Sunset-Beach, CA :
Lattice Press,
1986.
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Physical Description: |
XXIV, 660 S. |
Note: |
englisch |
ISBN: |
9780961672133 0961672137 |
Series Title: |
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Silicon processing for the VLSI era ;
1. |
Subject (ZB): | |
Classification: |
ZB | |
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Open Stacks Call number: B 061161'01'-001 Barcode: 1087002612 Available |