Silicon processing for the VLSI era. 1. Process technology / Stanley Wolf ; Richard N. Tauber.
Saved in:
| Personal Name(s): | Wolf, Stanley. |
|---|---|
| Tauber, Richard N. | |
| Imprint: |
Sunset-Beach, CA :
Lattice Press,
1986.
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| Physical Description: |
XXIV, 660 S. |
| Note: |
englisch |
| ISBN: |
9780961672133 0961672137 |
| Series Title: |
Silicon processing for the VLSI era ;
1. |
| Subject (ZB): | |
| Classification: |
| ZB | |
|---|---|
Open Stacks  Call Number: B 061161'01'-001 Barcode: 1087002612
Available
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