Silicon processing for the VLSI era. 1. Process technology / Stanley Wolf ; Richard N. Tauber.
Saved in:
Personal Name(s): | Wolf, Stanley. |
---|---|
Tauber, Richard N. | |
Imprint: |
Sunset-Beach, CA :
Lattice Press,
1986.
|
Physical Description: |
XXIV, 660 S. |
Note: |
englisch |
ISBN: |
9780961672133 0961672137 |
Series Title: |
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Silicon processing for the VLSI era ;
1. |
Subject (ZB): | |
Classification: |
LEADER | 00841cam a2200241 n 4500 | ||
---|---|---|---|
001 | 117845 | ||
005 | 20010607130400.0 | ||
008 | r1986 | ||
020 | |a 0961672137 | ||
035 | |a (Sirsi) a104938 | ||
084 | 0 | |a FGM - Microelectronic technology |2 ZB | |
245 | 0 | 0 | |a Silicon processing for the VLSI era. |n 1. |p Process technology / |c Stanley Wolf ; Richard N. Tauber. |
260 | |a Sunset-Beach, CA : |b Lattice Press, |c 1986. | ||
300 | |a XXIV, 660 S. | ||
490 | 0 | |a Silicon processing for the VLSI era ; |v 1. | |
500 | |a englisch | ||
596 | |a 1 | ||
650 | 4 | |a VLSI technology | |
700 | 1 | |a Wolf, Stanley. | |
700 | 1 | |a Tauber, Richard N. | |
900 | |a B 061161'01'-001 | ||
908 | |a Monographie, Sammelwerk | ||
949 | |a B 061161'01'-001 |w LC |c 1 |i 1087002612 |d 23/1/2002 |e 13/12/2001 |l STACKS |m ZB |n 8 |r Y |s Y |t ZBB |u 25/3/2009 |x ZB-F |1 PRINT |