Contemporary preparative techniques.
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| Personal Name(s): | Francombe, M. H., editor |
|---|---|
| Imprint: |
Boston, MA :
Academic Pr.,
1989.
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| Physical Description: |
X, 259 S. |
| Note: |
englisch |
| ISBN: |
0125330146 9780125330145 |
| Series Title: |
Physics of thin films ;
14. |
| Keywords: |
reactive sputtering plasma oxidation cathodic arc plasma deposition of thin films preparation of substrates for film deposition using glow discharge techniques |
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| Classification: | |
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