Contemporary preparative techniques.

Saved in:
Francombe, M. H., (editor)
Boston, MA : Academic Pr., 1989.
X, 259 S.
englisch
0125330146
9780125330145
Physics of thin films ; 14.
reactive sputtering
plasma oxidation
cathodic arc plasma deposition of thin films
preparation of substrates for film deposition using glow discharge techniques

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